深圳市天铉真空技术有限公司

This BOC Edwards GVSP30 / Varian 600DS Dry Scroll Pump has a gas ballast facility and a new position for the exhaust outlet port, which allows any condenstates to drain from the pump. Applications Include, Scanning electron microscopes, Ion implanters (beamline and end stations) General clean pumping applications and Sputtering.

The pump specifications are as follows:

? Displacement: 50 Hz operation - 30 m3h-1/17.6 ft3min-1
60 Hz operation - 36 m3h-1/21.2 ft3min-1
? Peak Pumping Speed: 50 Hz operation - 25 m3h-1, 16 ft3min-1
60 Hz operation - 30 m3h-1, 17.6 ft3min-1
? Ultimate Vacuum (Total Pressure) 1 x 10-2mbar/7.5 x 10-3Torr
? Inlet Connections: NW40
? Outlet Connections: NW25
? Maximum Allowed inlet pressure 1000 mbar
? Maximum allowed outlet pressure 1150 mbar
? Motor Power: 0.6 kW
? Electrical Supply Single phase, 60Hz/50Hz 110-220V ? Operating Temperature Range: 5 - 40°C / 41° to 104°C
? Enclosure rating IPP44 ? Leak Tightness (static): <10-4mbar l s-1